2012

[New repair technologies contributing to increased productivity during the FPD substrate manufacturing process]

NTN Corporation (hereafter, NTN) has developed the “Removal Device of Microscopic Foreign Object” for removing micron-scale foreign objects that have adhered to color filter substrates of flat panel displays (hereafter, FPD) and other components using new repair technologies.

With increases in panel area and higher picture quality, micron-scale foreign objects can adhere to color filter substrates for FPD and photo mask substrates for exposures used during the manufacturing processes, or become embedded within the film itself, both of which can result in an increase in the failure rate.

In the past, laser irradiation or grinding tape had been used to remove foreign objects, however these methods always left some residue from foreign objects remaining, or removed surrounding components at the same time. There has been growing demand for more accurate removal technologies.

The “Removal Device of Microscopic Foreign Object” developed by NTN is equipped with a special needle featuring a new shape to directly remove micron-scale foreign objects, and that can easily be controlled on a monitor using a mouse to highlight removal positions. This allows foreign objects that have adhered to or become embedded within the substrate surface to be removed more accurately, while reducing damage to surrounding components. The device can also be used to collect and recover any foreign objects removed or adhered to the needle, which results in quicker, mechanized and easier cleaning after removal has been completed.

NTN has been focusing on improving repair technology for micro-defects occurring during the FPD substrate manufacturing process for large LCDs, organic EL and other displays. This new repair technology will contribute to further increases in productivity during the manufacturing process of FPD substrates for large LCDs, organic EL, panels for smartphone and tablet PCs and other displays that are expanding markets around the world, and will also be marketed globally.

Features

1. Removal of foreign objects using a special needle with slotted screwdriver-shaped tip.
   ⇒ Allows removal of micron-scale foreign objects that was difficult using conventional removal methods (such as laser cutting, grinding).
2. Specify foreign objects repair areas using a mouse on the monitor.
   ⇒ Allows simple and precise removal of foreign objects while minimizing damage to surrounding components (shortening the repair process).
3. Reliable collection of removed foreign objects or residue from foreign objects adhered to the needle using suction or adhesive rollers.
   ⇒ Quicker and easier cleaning process after repairs.

Inquiries about this release

Example of the Removal Device of Microscopic Foreign Object in use